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Haven’t tried it on tablets and smartphones yet.

This invention relates generally to a semiconductor device and a method for forming the same. In particular, the invention pertains to a semiconductor device including a metal-insulator-metal (MIM) capacitor and a method for forming the same.
Because of the growing demand for higher-density integrated circuits, it has been a constant goal to develop new techniques to increase the number of components per unit area of a given integrated circuit. One of the major goals of this effort is to decrease the size of individual circuit elements while the number of elements is increased. However, a decrease in circuit element size generally leads to an increase in resistance. For this reason, the development of materials, structures, and processing steps is required to mitigate the effects of increasing circuit density on device performance and reliability.
One semiconductor device that has recently attracted a great deal of interest is the MIM capacitor. A MIM capacitor can advantageously be used as a low-loss capacitor because it typically has a lower internal series resistance than a comparable ferroelectric capacitor and also has a very low leakage current.
Various types of MIM capacitor designs have been proposed, and the size of the MIM capacitor has been reduced.
One design involves an MIM capacitor on a semiconductor substrate. The capacitor dielectric layer is formed on the substrate. A bottom electrode and a top electrode are formed on the dielectric layer. A via hole is formed in the substrate, and the bottom and top electrodes are interconnected through the via hole.
Another design involves an MIM capacitor on an insulating substrate. The capacitor dielectric layer is formed on the substrate, and the dielectric layer is patterned to form a via opening. Then, a bottom electrode is formed on the dielectric layer and is covered by a blocking layer. A capacitor dielectric layer is formed on the bottom electrode and is patterned to form a via hole. Then, a top electrode is formed on the capacitor dielectric layer and is covered by a blocking layer.
A still another design involves an MIM capacitor on an insulating substrate. A bottom electrode is formed on the substrate. Then, a blocking layer and a capacitor dielectric layer are sequentially formed on the bottom electrode. A top electrode is formed

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