160511 2020 T M Revolution ALL TIME BEST 320K.epub !!INSTALL!! ⏭

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A:

I think I have it. It’s a pdf format, open it and search for the book by title. There is a table of contents on first page.

A large number of recent trends in semiconductor integrated circuit (IC) fabrication technology demand precise registration between a photoresist mask and a feature on the semiconductor substrate. This registration must be maintained with tight tolerances throughout the various stages of processing, from photoresist application to etch, to ashing, to photoresist removal, to eventual stripping of the photoresist from the substrate surface. This registration is particularly critical during etch processing, where the etch chemistry must be precisely directed to the intended features.
Generally, the photoresist pattern is generated by photolithography, and is transferred to an etch mask or resist layer via an etch chemistry, to create a pattern for the etch. A resist layer is applied to the semiconductor wafer, typically a layer of photoresist. The etch chemistry is then applied to the wafer, and when etching has completed, the etch chemistry must be removed from the wafer without damaging the substrate surface. The etch chemistry must be confined to the previously defined features, and must not etch to areas outside of the previously defined features.
In some instances, the previously defined features are rectangular in shape, and the etch chemistry is confined to a region defined by edges of the features. However, more common are features that include trenches and/or other complex geometries. Because of the complex shapes and precise specifications of many of the structures in an integrated circuit, the area of the surface of the substrate that is exposed to the etch chemistry must be constrained.
Various processes are used to remove the etch chemistry from the semiconductor surface. The chemistry, typically a dilute HF solution, etches the wafer, and then the etch chemistry is removed from the surface of the wafer using deionized water, and various other solvents, or combinations thereof. If the etch chemistry is deposited on the walls of deep narrow trenches, or other submicron or micron sized features, or on areas of the wafer that are sufficiently large that the chemistry cannot remove the etch
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