Ares 3.1.9.4045 Keygen [HOT]
Ares 3.1.9.4045 Keygen [HOT]
Ares 3.1.9.4045 Keygen
In case Ares is not running, launch it, hit start, then choose system, then go to properties, and finally go to the manager. Find Ares 3.1.9.4045 and right click and hit delete. Then, right click on Ares 3.1.9.4045 again and hit remove..1. Field of the Invention
The present invention relates to a semiconductor device and a method of manufacturing the same, and more particularly, to a semiconductor device having a connection structure between two conductive plugs formed in an interlayer insulating film and a method of manufacturing the same.
2. Description of the Related Art
In recent years, high integration of a semiconductor device has been required and there has been a tendency to reduce a pitch between a conductive pattern formed on an interlayer insulating film and a plug formed in the interlayer insulating film in order to reduce the pitch between the conductive patterns. When the pitch between the conductive patterns is reduced, a contact area between the plug and the conductive pattern is reduced, resulting in poor contact in the contact portion between the plug and the conductive pattern.
When a conductive film is formed in the interlayer insulating film and then a through hole is formed in the interlayer insulating film in order to alleviate the above problem, a contact area between a conductive film formed in the through hole and the conductive pattern formed in the interlayer insulating film is increased. However, a space around the conductive film formed in the through hole is reduced and the conductive film formed in the through hole is formed only in the bottom portion of the through hole. When the contact portion between the conductive film and the conductive pattern is reduced, the contact resistance becomes higher than a desired value. In order to prevent the contact resistance from increasing, the conductive film formed in the through hole must be made thick.
As described above, when two conductive plugs, one of which is formed in the through hole and the other of which is formed on the interlayer insulating film, are formed, a contact area between the conductive plug formed on the interlayer insulating film and the conductive pattern formed on the interlayer insulating film becomes very small. Therefore, the contact resistance is higher than the desired value.
A first aspect of the present invention is a semiconductor device comprising: a semiconductor substrate; an interlayer insulating film formed on the semiconductor substrate, the interlayer insulating
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